A vacuum ball valve is a valve designed specifically for vacuum systems, used to control the on/off of media in vacuum or low-pressure environments. Its core structure includes a valve body, a sphere, a valve seat, and an actuator, which can be opened and closed by rotating the sphere 90 degrees.

The following are its main characteristics:

Structure and Principle

Spherical sealing: The sealing method adopts the contact between the spherical surface and the valve seat to ensure reliable sealing under vacuum and low pressure conditions.

Drive mode: It can be manually, electrically, or pneumatically driven to meet different automation needs.

Performance Characteristics

High vacuum adaptability: The working pressure range is wide, from 1.3 × 10 ⁻⁷ Pa to 6 × 10 ⁵ Pa, suitable for high vacuum to atmospheric pressure environments.

Excellent sealing performance: The leakage rate can be as low as 1 × 10 ⁻¹⁰ Pa · m ³/s, effectively maintaining the vacuum degree of the system.

Strong corrosion resistance: The valve body is mostly made of stainless steel material, and the seals are made of polytetrafluoroethylene (PTFE), fluororubber, etc., which are resistant to acid, alkali, and corrosive media.

Flexible operation: Supports installation at any position, suitable for positive and negative pressure conditions.

Application field

Semiconductor manufacturing: Control the gas flow rate in the reaction chamber to ensure a clean manufacturing environment.

Vacuum coating: Adjust the gas flow inside the coating chamber to achieve high-quality film deposition.

Chemical and Pharmaceutical: Used for vacuum conveying and processing of acidic and alkaline media, in compliance with GMP standards.

Aerospace: Ensuring sealing and reliability in fuel systems.

Types and classifications

By driving mode: manual, electric, pneumatic vacuum ball valve.

According to the connection method: flange connection (smooth, concave convex, etc.), threaded connection.

Vacuum ball valves play a crucial role in industrial fields that require precise control of vacuum environments due to their excellent sealing performance and wide adaptability.